SFC5500-200SLM

SFC5500-200SLM is an SFC5500 series mass flow controller. The sensor is based on the microthermal measurement principle and makes use of Sensirion’s proven CMOSens® MEMS Technology. This allowed us to build a radical mass flow controller with best-in-class performance and excellent reliability, which, unlike most other devices on the market, does not drift and does not require in-service recalibration. The SFC5500 offers ultra-fast settling time and a high control range. It is factory calibrated for multiple gases and combines smart features such as gas recognition and self-test capability. Finally, it offers high flexibility regarding mechanical connectors, which can be exchanged with off-the-shelf components. Applications include analytical instrumentation, coating/etching equipment, medical equipment, process automation and gas mixing to name a few.

• G ¼″ flange compatible with a broad range of connectors: e.g. Swagelok, Legris, Festo
• Calibrated for multiple gases (Air, N2, O2, H2, He, CH4, N2O, Ar, CO2)
• Digital interface with temperature-compensated output
• Ultra-fast settling time (<100ms)
• Mean time between failures (MTBF) 169 years
• No drift and no re-calibration required in the field
• NIST-traceable calibration
• 0.2sl/min to 200sl/min flow range
• 145psi maximum operating pressure
• Operating temperature range from 0°C to 50°C